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Technology of Semiconductors (TS 1)

Electronic document: 
application/pdf iconTS-MISE_en.pdf
Créditos Totales: 
4.0
Delivery dates: 
First semester
Type of subject: 
Itinerario I2
Instructional Objectives: 

The objective of this course is for students to acquire a basic knowledge of the most important technological processes applied to semiconductor materials used primarily in the field of nano- and microelectronics. Furthermore, the main effects that these techno-logical processes have on the optical and electrical properties will be explained as well as their application in optoelectronic devices.

DEVELOPMENT OF THE COURSE AND METHODOLOGY

For the development of the course there will be theory participative classes and discus-sion sessions and resolution practical problems. A collaborative teaching methodology will be used, promoting student-teacher interaction in tutoring and student-student, through discussions.

Program: 



TOPIC

Attendande hours

I.- Introduction to semiconductor materials

4

II. Manufacture of semiconductor materials

2

III. Epitaxy of semiconductor materials

III.1 Liquid Phase Epitaxy technique (LPE)

III.2 MOCVD technique

III.3 MBE technique

6

IV. Doping techniques materials

IV.1 Doping by diffusion

IV.2 Doping by ion implantation

4

V. Thermal Oxidation

2

VI. Deposition in stage vapor (CVD) of insulating ma-terials

2

VII. Metallization

2

VIII. Chemical attacks wet and dry

2

IX. Optical lithography and electron beam

2

 

Review: 

First exam

The score is divided in several parts:

  • First part of the course (exercises) : 10%
  • Second part of the course (exercises) : 15%
  • Third part of the course (exercises) : 15%
  • Written exam including all subjects: 60%

 

Extraordinary exam

A unique written exam including all subjects.

Faculty
Coordinator: 
Miguel Angel Sánchez García
Professor: 
Miguel Angel Sánchez García
Alvaro de Guzmán Fernández González
Más Información
Subject code: 
93000712
Degree to which it belongs: 
M.Sc. in Electronic Systems Engineering (MISE)
PhD in Electronic Systems (RD 1393/2007)
Course Number which belongs within the qualification: 
5
Center impartation: 
ETSIT
Academic year of teaching: 
2012-2013
Bibliography: 

The teaching material consists of a collection of slides of the different classes taught that will be fully accessible through the web page of the course, even prior to the corresponding class.
It does not follow a particular book, but there are recommended a few for reference, all availa-ble in the school library:
− S.M. Sze, “Physics of Semiconductor Devices”. John Willey & Sons, 3rd edi-tion (2007)
− G.S. May, S.M. Sze, “Fundamentals of Semiconductor Fabrication”, John Wiley & Sons (2003).
5. MATERIAL RESOURCES AVAILABLE
For the development of this course there is no additional material resources are required.